Growth of isolated domains induced by focused ion beam irradiation in congruent lithium niobate / Chezganov D. S.,Vlasov E. O.,Gimadeeva L. V.,Alikin D. O.,Chuvakova M. A.,Vaskina E. M.,Shur V. Ya. // FERROELECTRICS. - 2017. - V. 508, l. 1. - P. 16-25.

ISSN/EISSN:

0015-0193 / 1563-5112

Type:

Article

Abstract:

Formation of isolated domains induced by i-beam irradiation in single crystals of congruent lithium niobate with polar surface covered by uniform resist layer was studied. The change of domain shape with dose increase was attributed to gradual penetration of charge through the resist layer caused by i-beam milling. The appearance of the dendrite structures was attributed to formation of the surface dielectric gap due to out-diffusion of oxygen to electrode. We applied the obtained knowledge for creation of the 1-mu m-period 2D square arrays of isolated domains with minimal radius about 300nm and the 1-mu m-period 1D pattern of stripe domains.

Author keywords:

Lithium niobate; domain engineering; focused ion beam patterning ELECTRON-BEAM; LINBO3 CRYSTALS; RESIST LAYER; WAVE-GUIDES; INVERSION; NANOSCALE; TANTALATE; DEVICES; SURFACE; FIELD

DOI:

10.1080/00150193.2017.1286214

Web of Science ID:

ISI:000399740700003

Соавторы в МНС:

Другие поля

Поле	Значение
Publisher	TAYLOR \& FRANCIS LTD
Address	2-4 PARK SQUARE, MILTON PARK, ABINGDON OR14 4RN, OXON, ENGLAND
Language	English
EISSN	1563-5112
Keywords-Plus	ELECTRON-BEAM; LINBO3 CRYSTALS; RESIST LAYER; WAVE-GUIDES; INVERSION; NANOSCALE; TANTALATE; DEVICES; SURFACE; FIELD
Research-Areas	Materials Science; Physics
Web-of-Science-Categories	Materials Science, Multidisciplinary; Physics, Condensed Matter
Author-Email	chezganov.dmitry@urfu.ru
ResearcherID-Numbers	Shur, Vladimir/J-9078-2015
Funding-Acknowledgement	RFBR {[}15-32-21102-mol\_a\_ved]; Government of the Russian Federation (Act 211) {[}02.A03.21.0006]; President of Russian Federation grant for young scientists {[}14.Y30.16.8441-MK]; State Task from the Ministry of Education and Science of the Russian Federation {[}1366.2014/236]
Funding-Text	The equipment of the Ural Center for Shared Use ``Modern nanotechnology{''} UrFU was used. The research was made possible in part by RFBR (15-32-21102-mol\_a\_ved), by Government of the Russian Federation (Act 211, Agreement 02.A03.21.0006), and by President of Russian Federation grant for young scientists (Contract 14.Y30.16.8441-MK). V.S. acknowledges financial support within the State Task from the Ministry of Education and Science of the Russian Federation (Project No. 1366.2014/236).
Number-of-Cited-References	49
Usage-Count-Last-180-days	1
Usage-Count-Since-2013	1
Journal-ISO	Ferroelectrics
Doc-Delivery-Number	ES7OV