Book-Group-Author |
IOP |
Booktitle |
13TH INTERNATIONAL CONFERENCE ON FILMS AND COATINGS |
Series |
Journal of Physics Conference Series |
Note |
13th International Conference on Films and Coatings (ICFC), St Petersburg, RUSSIA, APR 18-20, 2017 |
Organization |
Russian Acad Sci; Russian Acad Sci, Inst Problems Mech Engn; Saint Petersburg Electrotechn Univ LETI; Saint Petersburg Polytechn Univ |
Publisher |
IOP PUBLISHING LTD |
Address |
DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND |
Language |
English |
Article-Number |
UNSP 012017 |
Keywords-Plus |
BORON-NITRIDE FILM; C-BN; DC |
Research-Areas |
Materials Science; Physics |
Web-of-Science-Categories |
Materials Science, Coatings \& Films; Physics, Applied |
Author-Email |
alx@iep.uran.ru |
ResearcherID-Numbers |
Kamenetskikh, Alexander/T-8725-2017 |
ORCID-Numbers |
Cholakh, Seif/0000-0002-9313-6614 |
Funding-Acknowledgement |
Ural Department of RAS {[}15-17-2-28] |
Funding-Text |
The work was accomplished with support of Complex Program of the Ural Department of RAS (project No 15-17-2-28). |
Number-of-Cited-References |
14 |
Usage-Count-Last-180-days |
1 |
Usage-Count-Since-2013 |
1 |
Doc-Delivery-Number |
BI5QJ |