BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma / Kamenetskikh A. S.,Gavrilov N. V.,Koryakova O. V.,Cholakh S. O. // . - 2017. - V. 857, l. .

ISSN/EISSN:
1742-6588 / нет данных
Type:
Proceedings Paper
Abstract:
Boron nitride coatings were deposited by reactive pulsed magnetron sputtering of B and BN targets (50 kHz, 10 mu s for B; 13.56 MHz for BN) at 2-20 mA/cm(2) ion current density on the substrate. The effect of electron beam generated plasma on characteristics of magnetron discharge and phase composition of coatings was studied.
Author keywords:
BORON-NITRIDE FILM; C-BN; DC
DOI:
10.1088/1742-6596/857/1/012017
Web of Science ID:
ISI:000412709600017
Соавторы в МНС:
Другие поля
Поле Значение
Book-Group-Author IOP
Booktitle 13TH INTERNATIONAL CONFERENCE ON FILMS AND COATINGS
Series Journal of Physics Conference Series
Note 13th International Conference on Films and Coatings (ICFC), St Petersburg, RUSSIA, APR 18-20, 2017
Organization Russian Acad Sci; Russian Acad Sci, Inst Problems Mech Engn; Saint Petersburg Electrotechn Univ LETI; Saint Petersburg Polytechn Univ
Publisher IOP PUBLISHING LTD
Address DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND
Language English
Article-Number UNSP 012017
Keywords-Plus BORON-NITRIDE FILM; C-BN; DC
Research-Areas Materials Science; Physics
Web-of-Science-Categories Materials Science, Coatings \& Films; Physics, Applied
Author-Email alx@iep.uran.ru
ResearcherID-Numbers Kamenetskikh, Alexander/T-8725-2017
ORCID-Numbers Cholakh, Seif/0000-0002-9313-6614
Funding-Acknowledgement Ural Department of RAS {[}15-17-2-28]
Funding-Text The work was accomplished with support of Complex Program of the Ural Department of RAS (project No 15-17-2-28).
Number-of-Cited-References 14
Usage-Count-Last-180-days 1
Usage-Count-Since-2013 1
Doc-Delivery-Number BI5QJ