Structure, chemistry and luminescence properties of dielectric LaxHf1-xOy films / Kaichev V. V.,Smirnova T. P.,Yakovkina L. V.,Ivanova E. V.,Zamoryanskaya M. V.,Saraev A. A.,Pustovarov V. A.,Perevalov T. V.,Gritsenko V. A. // MATERIALS CHEMISTRY AND PHYSICS. - 2016. - V. 175, l. . - P. 200-205.

ISSN/EISSN:

0254-0584 / 1879-3312

Type:

Article

Abstract:

Dielectric films of La2O3, HfO2, and LaxHf1-xOy were synthesized by metal-organic chemical vapor deposition. Structural, chemical, and luminescence properties of the films were studied using X-ray photoelectron spectroscopy, methods of X-ray diffraction and selected area electron diffraction, high-resolution transmission electron microscopy, and a cathodoluminescence technique. It was found that doping of hafnium oxide with lanthanum leads to the formation of a continuous series of solid solutions with a cubic structure. This process is accompanied by the formation of oxygen vacancies in the HfO2 lattice. Cathodoluminescence spectra of the LaxHf1-xOy/Si films exhibited a wide band with the maximum near 2.4-2.5 eV, which corresponds to the blue emission. Quantum-chemical calculations showed that this blue band is due to oxygen vacancies in the HfO2 lattice. (C) 2016 Elsevier B.V. All rights reserved.

Author keywords:

Electronic materials; Thin films; Luminescence; Defects RAY PHOTOELECTRON-SPECTROSCOPY; FIELD-EFFECT TRANSISTORS; HFO2 FILMS; PHOTOLUMINESCENCE; DEPOSITION; LANTHANUM; LA2HF2O7; ALUMINA; SYSTEM; GROWTH

DOI:

10.1016/j.matchemphys.2016.03.

Web of Science ID:

ISI:000374612000025

Соавторы в МНС:

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Другие поля

Поле	Значение
Month	JUN 1
Publisher	ELSEVIER SCIENCE SA
Address	PO BOX 564, 1001 LAUSANNE, SWITZERLAND
Language	English
EISSN	1879-3312
Keywords-Plus	RAY PHOTOELECTRON-SPECTROSCOPY; FIELD-EFFECT TRANSISTORS; HFO2 FILMS; PHOTOLUMINESCENCE; DEPOSITION; LANTHANUM; LA2HF2O7; ALUMINA; SYSTEM; GROWTH
Research-Areas	Materials Science
Web-of-Science-Categories	Materials Science, Multidisciplinary
Author-Email	vvk@catalysis.ru
ResearcherID-Numbers	Perevalov, Timofey/H-4243-2017 Ivanova, Ekaterina/A-8444-2014 Saraev, Andrey/L-6327-2013 Kaichev, Vasily/M-2923-2013
ORCID-Numbers	Saraev, Andrey/0000-0001-9610-9921 Kaichev, Vasily/0000-0002-1516-2817 Yakovkina, Lyubov/0000-0001-8916-7453
Funding-Acknowledgement	Russian Science Foundation {[}14-19-00192]
Funding-Text	This work was partially supported by the Russian Science Foundation (Research project No. 14-19-00192, calculations and modeling). The computations were carried out at the Supercomputer Center of the Novosibirsk State University.
Number-of-Cited-References	40
Usage-Count-Last-180-days	3
Usage-Count-Since-2013	16
Journal-ISO	Mater. Chem. Phys.
Doc-Delivery-Number	DK0OL