Cathodo- and photoluminescence increase in amorphous hafnium oxide under annealing in oxygen / Ivanova E. V.,Zamoryanskaya M. V.,Pustovarov V. A.,Aliev V. Sh.,Gritsenko V. A.,Yelisseyev A. P. // JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS. - 2015. - V. 120, l. 4. - P. 710-715.

ISSN/EISSN:

1063-7761 / 1090-6509

Type:

Article

Abstract:

Cathodo- and photoluminescence of amorphous nonstoichiometric films of hafnium oxide are studied with the aim to verify the hypothesis that oxygen vacancies are responsible for the luminescence. To produce oxygen vacancies, hafnium oxide was enriched in surplus metal during synthesis. To reduce the oxygen concentration, the film was annealed in oxygen. A qualitative control of the oxygen concentration was carried out by the refractive index. In the initial, almost stoichiometric films we observed a 2.7-eV band in cathodoluminescence. Annealing in oxygen results in a considerable increase in its intensity, as well as in the appearance of new bands at 1.87, 2.14, 3.40, and 3.6 eV. The observed emission bands are supposed to be due to single oxygen vacancies and polyvacancies in hafnium oxide. The luminescence increase under annealing in an oxygen atmosphere may be a result of the emission quenching effect.

Author keywords:

HFO2 THIN-FILMS; SPECTROSCOPIC ELLIPSOMETRY; ULTRAVIOLET PHOTONS; DIELECTRICS; TECHNOLOGY

DOI:

10.1134/S1063776115020132

Web of Science ID:

ISI:000355216500015

Соавторы в МНС:

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Другие поля

Поле	Значение
Month	APR
Publisher	MAIK NAUKA/INTERPERIODICA/SPRINGER
Address	233 SPRING ST, NEW YORK, NY 10013-1578 USA
Language	English
EISSN	1090-6509
Keywords-Plus	HFO2 THIN-FILMS; SPECTROSCOPIC ELLIPSOMETRY; ULTRAVIOLET PHOTONS; DIELECTRICS; TECHNOLOGY
Research-Areas	Physics
Web-of-Science-Categories	Physics, Multidisciplinary
Author-Email	ivanova@mail.ioffe.ru
ResearcherID-Numbers	Yelisseyev, Alexander/A-3846-2014 Ivanova, Ekaterina/A-8444-2014
Funding-Acknowledgement	Russian Science Foundation {[}14-19-00192]
Funding-Text	This work was supported by the Russian Science Foundation (grant no. 14-19-00192).
Number-of-Cited-References	24
Usage-Count-Last-180-days	2
Usage-Count-Since-2013	8
Journal-ISO	J. Exp. Theor. Phys.
Doc-Delivery-Number	CJ1BL