Oxygen deficiency defects in amorphous Al2O3 / Perevalov T. V.,Tereshenko O. E.,Gritsenko V. A.,Pustovarov V. A.,Yelisseyev A. P.,Park Chanjin,Han Jeong Hee,Lee Choongman // JOURNAL OF APPLIED PHYSICS. - 2010. - V. 108, l. 1.

ISSN/EISSN:
0021-8979 / 1089-7550
Type:
Article
Abstract:
In the electron energy loss spectra for amorphous, atomic layer deposited (ALD) Al2O3 film, a peak at 6.4 eV was observed. First principle quantum chemical simulation shows that it relates to excitation of neutral oxygen vacancy in Al2O3. The 2.91 eV luminescence excited in a band near 6.0 eV in amorphous Al2O3 is similar to that in bulk crystals which is associated with neutral oxygen vacancy. Thus, the amorphous ALD Al2O3 film is oxygen deficient and the oxygen vacancy parameters are similar in crystalline and amorphous Al2O3. (C) 2010 American Institute of Physics. {[}doi: 10.1063/1.3455843]
Author keywords:
THRESHOLD ENERGY; ALUMINUM-OXIDE; LUMINESCENCE; CENTERS; ALPHA-AL2O3; SAPPHIRE; CRYSTALS; PHOTOGENERATION; CORUNDUM; MEMORY
DOI:
10.1063/1.3455843
Web of Science ID:
ISI:000280000400014
Соавторы в МНС:
Другие поля
Поле Значение
Month JUL
Publisher AMER INST PHYSICS
Address CIRCULATION \& FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA
Language English
Article-Number 013501
EISSN 1089-7550
Keywords-Plus THRESHOLD ENERGY; ALUMINUM-OXIDE; LUMINESCENCE; CENTERS; ALPHA-AL2O3; SAPPHIRE; CRYSTALS; PHOTOGENERATION; CORUNDUM; MEMORY
Research-Areas Physics
Web-of-Science-Categories Physics, Applied
ResearcherID-Numbers Yelisseyev, Alexander/A-3846-2014 Perevalov, Timofey/H-4243-2017
ORCID-Numbers Gritsenko, Vladimir/0000-0003-1646-0848
Funding-Acknowledgement Siberian Branch of the Russian Academy of Sciences {[}70]; Ministry of Science and Technology of the Republic Korea
Funding-Text This work was supported by the Siberian Branch of the Russian Academy of Sciences (Integration Grant No. 70) and by the Ministry of Science and Technology of the Republic Korea (National Program for Tera-Level Nanodevices). We would like to thank A. V. Shaposhnikov for helpful discussions.
Number-of-Cited-References 22
Usage-Count-Last-180-days 3
Usage-Count-Since-2013 49
Journal-ISO J. Appl. Phys.
Doc-Delivery-Number 626XB