Electron beam domain patterning of MgO-doped lithium niobate crystals covered by resist layer / Chezganov D.S., Smirnov M.M., Kuznetsov D.K., Shur V.Y. // Ferroelectrics. - 2015. - V. 476, l. 1. - P. 117-126.

ISSN:
00150193
Type:
Article
Abstract:
The electron beam domain patterning of MgO-doped congruent lithium niobate (LN) single crystals covered by electron beam resist layer were studied for various layer thicknesses and electron accelerating voltages. The obtained domain patterns were divided in four types. The increasing of the domain structure quality under presence of the resist layer on irradiated surface was confirmed. This effect was attributed to high concentration of the electron traps in resist, which localized incident electrons in limited volume over LN surface and formed effective electrode. The voltage dependence of space charge localization relative to the LN surface was studied by computer simulation. Copyright © Taylor & Francis Group, LLC.
Author keywords:
Domain structure; Electron beam patterning; Electron beam resist; Lithium niobate; Regular domain structure
Index keywords:
Electron beams; Lithium; Magnesia; Niobium compounds; Single crystals; Domain structure; Electron beam patterning; Electron beam resist; Lithium niobate; Regular domain structure; Electrons
DOI:
10.1080/00150193.2015.998909
Смотреть в Scopus:
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84932938917&doi=10.1080%2f00150193.2015.998909&partnerID=40&md5=4e8136fd232d5f5c21e17d12543e659e
Соавторы в МНС:
Другие поля
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Link https://www.scopus.com/inward/record.uri?eid=2-s2.0-84932938917&doi=10.1080%2f00150193.2015.998909&partnerID=40&md5=4e8136fd232d5f5c21e17d12543e659e
Affiliations Institute of Natural Sciences, Ural Federal University, Ekaterinburg, Russian Federation; Labfer Ltd., Ekaterinburg, Russian Federation
Author Keywords Domain structure; Electron beam patterning; Electron beam resist; Lithium niobate; Regular domain structure
Funding Details 13-02-01391-a, RFBR, Ministry of Education and Science; 14-02-31255-mol-a, RFBR, Ministry of Education and Science; 14.594.21.0011, Ministry of Education and Science
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Correspondence Address Chezganov, D.S.; Institute of Natural Sciences, Ural Federal UniversityRussian Federation
Publisher Taylor and Francis Inc.
CODEN FEROA
Language of Original Document English
Abbreviated Source Title Ferroelectrics
Source Scopus