Laser-induced modification of glass-ceramics microstructure and applications / Veiko V.P., Kieu Q.K., Nikonorov N.V., Shur V.Y., Luches A., Rho S. // Applied Surface Science. - 2005. - V. 248, l. 1-4. - P. 231-237.

ISSN:

01694332

Type:

Conference Paper

Abstract:

The laser-induced modifications in two kinds of glass-ceramics (GCs) with composition TiO2-SiO2 (Sitall ST-50) and Li 2O-SiO2 (Fotoform) were investigated for fabricating optical elements. The laser-induced change of refractive index and surface relief constituted the first step of this task. The second stage was a chemical processing including ion exchange (Li ↔ Na, K, Rb, for "Fotoform" GCs) and etching of irradiated and non-irradiated areas. As a result of the above-mentioned processes, mini- and micro-optical components based on two GCs have been fabricated: lenses and lens arrays, waveguides and other waveguiding components, diffractive gratings, etc. © 2005 Elsevier B.V. All rights reserved.

Author keywords:

Crystallization; Glass ceramics; Laser amorphization; Local heating; Micro-optics

Index keywords:

Ceramic materials; Crystallization; Diffraction gratings; Ion exchange; Microoptics; Microstructure; Silica; Titanium oxides; Waveguides; Holographic corrections; Laser amorphization; Laser densificat

DOI:

10.1016/j.apsusc.2005.03.090

Смотреть в Scopus:

https://www.scopus.com/inward/record.uri?eid=2-s2.0-19944401197&doi=10.1016%2fj.apsusc.2005.03.090&partnerID=40&md5=057f2050f1b8f6331688db0656135e25

Соавторы в МНС:

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Другие поля

Поле	Значение
Link	https://www.scopus.com/inward/record.uri?eid=2-s2.0-19944401197&doi=10.1016%2fj.apsusc.2005.03.090&partnerID=40&md5=057f2050f1b8f6331688db0656135e25
Affiliations	St. Petersburg State University of Information Technologies, Mechanics and Optics, 14 Sablinskaya Street, St. Petersburg 197101, Russian Federation; University of Lecce, Department of Physics, Via Arnesano, 73100 Lecce, Italy
Author Keywords	Crystallization; Glass ceramics; Laser amorphization; Local heating; Micro-optics
References	Nikonorov, N., (1999) Glass Phys. Chem., 25, p. 207; Veiko, V.P., Jakovlev, E.B., Chuiko, V.A., Laser methods of control porous silica glasses structure (1992) Chemical Processing of Advanced Materials, p. 919. , L.L. Hench K. John West John K. West and Sons Inc; Veiko, V.P., Kieu, Q.K.S., (2004) Proceedings of SPIE, Vol. 5399, "Laser-assisted Micro- and Nanotechnologies 2003", p. 11; Berezhnoy, A.I., (1966) Sitally i Photositally (Russian Edition of Mashinostroenie); Veiko, V.P., Kromin, A.K., Jakovlev, E.B., (1993) Proceedings of SPIE, Vol. 1992, "Miniature and Microoptics", p. 159; Veiko, V.P., Yakovlev, E.B., (1994) Opt. Eng., 33, p. 3567; Veiko, V.P., Kieu, Q.K., Nikonorov, N.V., Laser applications for microelectronics and optoelectronics technology 2004 (2004) Proceedings of SPIE, 5339, p. 250; Nussbaum, Ph., Volkel, R., Herzig, H.P., Eisner, M., Haselbeck, S., (1997) Pure Appl. Opt., 6, p. 617; Borrelli, N.F., Morse, D.L., Bellman, R.H., Morgan, W.L., (1985) Appl. Opt., 24, p. 2520; Kieu, Q.K., Veiko, V.P., (2004) Proceedings of SPIE, Vol. 5399, "Laser-assisted Micro- and Nanotechnologies 2003", p. 126
Correspondence Address	Veiko, V.P.; St. Petersburg State University of Information Technologies, Mechanics and Optics, 14 Sablinskaya Street, St. Petersburg 197101, Russian Federation; email: veiko@lastech.ifmo.ru
CODEN	ASUSE
Language of Original Document	English
Abbreviated Source Title	Appl Surf Sci
Source	Scopus