Direct-write E-beam submicron domain engineering in LiNbO3 thin films grown by liquid phase epitaxy / Son J.-W., Yuen Y., Orlov S.S., Phillips B., Galambos L., Shur V.Ya., Hesselink L. // Materials Research Society Symposium - Proceedings. - 2003. - V. 784, l. . - P. 523-528.

ISSN:

02729172

Type:

Conference Paper

Abstract:

We demonstrate submicron ferroelectric domain engineering in liquid phase epitaxy (LPE) LiNbO3 thin films grown on LiNbO3 and LiTaO3 substrates using a direct-write electron beam poling for waveguide applications. LiNbO3 thin films of several-micron thickness were grown using a flux melt of 20 mol% LiNbO3 -80 mol% LiVO 3 . To engineer domain structures in Z oriented LPE LiNbO3 films, a direct-write electron beam poling was implemented. It is shown that we can engineer the domain structure of LPE LiNbO3 films by using direct e-beam poling, even though the domain orientations of the film and the substrate are opposite. We also compared e-beam poling behavior in a congruent LiNbOa single crystal and a LPE LiNbO3 film. Using the same e-beam scan parameters, a much enhanced domain structure is obtained in LPE films. Defect structure and composition effects are also discussed.

Author keywords:

Index keywords:

Bragg cells; Electron beams; Ferroelectricity; Ion exchange; Liquid phase epitaxy; Lithium compounds; Single crystals; Waveguides; E-beam poling; Peoridic domains; Thin film waveguides; Thin films

DOI:

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-2942657592&partnerID=40&md5=1e1fc26091a3f1370743ecd346189b64

Соавторы в МНС:

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Другие поля

Поле	Значение
Link	https://www.scopus.com/inward/record.uri?eid=2-s2.0-2942657592&partnerID=40&md5=1e1fc26091a3f1370743ecd346189b64
Affiliations	Solid State Photonics Lab., Stanford University, Stanford, CA 94305, United States; Inst. of Phys./Applied Mathematics, Ural State University, Ekaterinburg 620083, Russian Federation
References	Myers, L.E., Eckaidt, R.C., Fejer, M.M., Byer, R.L., Bosenberg, W.R., Pierce, J.W., (1995) J. Opt. Soc. Am. B, 12 (11), pp. 2102-2116; Yamada, M., Saitoh, M., Ooki, H., (1996) Appl. Phys. Lett., 69 (24), pp. 3659-3661; Busacca, A.C., Sones, C.L., Apostolopoulos, V., Eason, R.W., Mailis, S., (2002) Appl. Phys. Lett., 81 (26), pp. 4946-4948; Restoin, C., Darraud-Taupiac, C., Decossas, J.L., Vareille, J.C., Hauden, J., Martinez, A., (2000) J. Appl. Phys, 88 (11), pp. 6665-6668; Chou, M., (1999), Ph.D. Dissertation, Stanford University, Stanford; Kondo, S., Miyazawa, S., Fushimi, S., Sugii, K., (1975) App. Phys. Lett., 26 (9), pp. 489-491; Yamada, A., Tamada, H., Saitoh, M., (1993) J. Crys. Growth, 132, pp. 48-60; Kawaguchi, T., Yoon, D., Minakata, M., Okada, Y., Imaeda, M., Fukuda, T., (1995) J. Crys. Growth, 152, pp. 87-93; Kaigawa, K., Yamamura, Y., Kumazawa, Y., Kawaguchi, T., Imaeda, M., Sakai, H., Tsurumi, T., (2002) J. Crys. Growth, 244, pp. 70-77; Cho, Y., Matsuura, K., Kazuta, S., Odagawa, H., Yamanouchi, K., (1999) Jpn. J. Appl. Phys., 38 (5 PART 1 AND B), pp. 3279-3282
Correspondence Address	Son, J.-W.; Solid State Photonics Lab., Stanford University, Stanford, CA 94305, United States
Editors	Hoffmann-Eifert S.Funakubo H.Joshi V.Kingon A.I.Koutsaroff I.P.
Sponsors	Materials Research Society
Conference name	Ferroelectric Thin Films XII
Conference date	1 December 2003 through 4 December 2003
Conference location	Boston, MA
Conference code	63173
CODEN	MRSPD
Language of Original Document	English
Abbreviated Source Title	Mater Res Soc Symp Proc
Source	Scopus