Influence of crystallization kinetics on texture of sol-gel PZT and BST thin films / Shur V.Y., Blankova E.B., Subbotin A.L., Borisova E.A., Pelegov D.V., Hoffmann S., Bolten D., Gerhardt R., Waser R. // Journal of the European Ceramic Society. - 1999. - V. 19, l. 6-7. - P. 1391-1395.

ISSN:
09552219
Type:
Article
Abstract:
The evolution of morphology of sol-gel PZT and BST thin films during rapid thermal annealing (RTA) is investigated by recording of elastic light scattering data in reflected mode. The analysis of film morphology and texture evolution obtained by XRD reveals the dependence of crystallization kinetics on the annealing conditions. The evolution of film morphology during the transition to the perovskite phase is analysed by the time dependence of fractal dimensionality. The parameters characterizing the kinetics of the transformation to the perovskite phase are extracted by mathematical treatment of experimental data. A mechanism for texture formation is proposed.
Author keywords:
Films; Optical microscopy; PZT.; Sol-gel processes; X-ray methods
Index keywords:
Crystallization; Light scattering; Morphology; Phase transitions; Rapid thermal annealing; Reaction kinetics; Sol-gels; Textures; Thin films; Titanium oxides; X ray crystallography; Elastic light scat
DOI:
нет данных
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Affiliations Inst. of Phys. and Appl. Mathematics, Ural State University, 620083, Ekaterinburg, Russian Federation; Inst. Werkstoffe Der E., 52056, Aachen, Germany
Author Keywords Films; Optical microscopy; PZT.; Sol-gel processes; X-ray methods
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Correspondence Address Shur, V.Y.; Inst. of Phys. and Appl. Mathematics, Ural State University, 620083, Ekaterinburg, Russian Federation; email: vladimir.shur@usu.ru
Language of Original Document English
Abbreviated Source Title J. Eur. Ceram. Soc.
Source Scopus