Crystallization kinetics and texture of sol-gel PZT thin films / Shur V.Ya., Blankova E.B., Subbotin A.L., Borisova E.A., Bolten D., Gerhardt R., Waser R. // Materials Research Society Symposium - Proceedings. - 1999. - V. 541, l. . - P. 363-368.

ISSN:

02729172

Type:

Article

Abstract:

The morphology and phase evolution of sol-gel PZT thin films during rapid thermal annealing are investigated by in situ recording of scattered light intensity measured in reflected mode and momentary patterns visualized by optical microscope. In addition the texture and fractions of growing phases and the angular dependence of the scattered light are studied in partly annealed films. The kinetic parameters characterizing the transition from pyrochlore to perovskite phase are extracted by mathematical treatment of experimental data. It is shown that the film's texture and the transformation kinetics strongly depend on pyrolysis temperature. A mechanism of texture formation is proposed.

Author keywords:

Index keywords:

Crystallization; Morphology; Numerical analysis; Phase transitions; Pyrolysis; Rapid thermal annealing; Reaction kinetics; Textures; Thermal effects; Thin films; X ray diffraction; Crystallization kin

DOI:

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032592310&partnerID=40&md5=ee535ff06ca777667c3debf575e4d4c9

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Другие поля

Поле	Значение
Link	https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032592310&partnerID=40&md5=ee535ff06ca777667c3debf575e4d4c9
Affiliations	IPAM, Ural State University, 620083 Ekaterinburg, Russian Federation; IWE Rhein.-Westf. Technichen Hochschule Aachen, 52056 Aachen, Germany
References	Brooks, K.G., Reaney, I.M., Klissurka, R., Huang, Y., Bursill, L., Setter, N., (1994) J. Mater. Res., 9, p. 2540; Chen, J., Udayakumar, K.R., Brooks, K.G., Cross, L.E., (1992) J. Appl. Phys., 71, p. 4465; Huffman, M., Gealy, F.D., Kammerdiner, L., Zurcher, P., Zhu, J.G., Al-Jassim, M., Echer, C.J., (1992) Ferroelectrics, 134, p. 303; Klee, M., Larsen, P.K.J., (1992) Ferroelectrics, 133, p. 91; Wilkinson, A.P., Speck, J.S., Cheetham, A.K., Natarajan, S., Thomas, J.M., (1994) Chem. Mater., 6, p. 750; Trolier-McKinstry, S., Chen, J., Vedam, K., Newnham, R., (1995) J.Amer.Ceram.Soc., 78, p. 1907; Shur, V.Ya., Negashev, S.A., Rumyantsev, E.L., Subbotin, A.L., Makarov, S.D., (1995) Ferroelectrics, 169, p. 63; Shur, V.Ya., Negashev, S.A., Subbotin, A.L., Borisova, E.A., (1997) Ferroelectrics, 196, p. 183; Shur, V.Ya., Negashev, S.A., Subbotin, A.L., Borisova, E.A., Trolier-McKinstry, S., (1996) Mater. Res. Soc. Symp. Proc., 433, p. 351; Pronin, Zaytseva, N., Kaptelov, E., Afanasiev, V., (1997) Izv. RAN Ser. Fiz., 61, p. 379; Shur, V.Ya., Blankova, E.B., Subbotin, A.L., Borisova, E.A., Pelegov, D.V., Hoffmann, S., Bolten, D., Waser, R., J. Europ. Ceram. Soc., , in press; Libera, M., Chen, M., (1993) J. Appl. Phys., 73, p. 2272; Kolmogorov, A.N., (1937) Izv. Acad. Nauk USSR., Ser. Math., 3, p. 355; Avrami, M., (1939) Chem.Phys., 7, p. 1103; Griswold, E., Weaver, L., Sayer, M., Czerwinski, F., Szpunar, J., (1995) Micron, 26, p. 559
Correspondence Address	Shur, V.Ya.; Ural State Univ, Ekaterinburg, Russian Federation
Sponsors	Criterion Catalyst Company L.P.;EXXON Research and Engineering Company;Norton Chemicals;Shell Development Chemical Company;Union Carbide Corporation
Publisher	Materials Research Society, Warrendale, PA, United States
Conference name	Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998'
Conference date	30 November 1998 through 3 December 1998
Conference location	Boston, MA, USA
Conference code	55408
CODEN	MRSPD
Language of Original Document	English
Abbreviated Source Title	Mater Res Soc Symp Proc
Source	Scopus