Domain patterning by electron beam of MgO doped lithium niobate covered by resist / Shur V. Ya.,Chezganov D. S.,Akhmatkhanov A. R.,Kuznetsov D. K. // APPLIED PHYSICS LETTERS. - 2015. - V. 106, l. 23.

ISSN/EISSN:
0003-6951 / 1077-3118
Type:
Article
Abstract:
Periodical domain structuring by focused electron beam irradiation of MgO-doped lithium niobate (MgOCLN) single crystalline plate covered by resist layer was studied both experimentally and by computer simulation. The dependences of domain size on the charge dose and distance between isolated domains were measured. It has been shown that the quality of periodical domain pattern depends on the thickness of resist layer and electron energy. The experimentally obtained periodic domain structures have been divided into four types. The irradiation parameters for the most uniform patterning were obtained experimentally. It was shown by computer simulation that the space charge slightly touching the crystal surface produced the maximum value of electric field at the resist/LN interface thus resulting in the best pattern quality. The obtained knowledge allowed us to optimize the poling process and to make the periodical domain patterns in 1-mm-thick wafers with an area up to 1 x 5 mm(2) and a period of 6.89 mu m for green light second harmonic generation. Spatial distribution of the efficiency of light frequency conversion confirmed the high homogeneity of the tailored domain patterns. (C) 2015 AIP Publishing LLC.
Author keywords:
PERIODICALLY POLED LINBO3; 2ND-HARMONIC GENERATION; FERROELECTRIC DOMAINS; CRYSTALS; LITAO3; INVERSION; DEVICES; SURFACE; LAYER; FIELD
DOI:
10.1063/1.4922372
Web of Science ID:
ISI:000356170900028
Соавторы в МНС:
Другие поля
Поле Значение
Month JUN 8
Publisher AMER INST PHYSICS
Address 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Language English
Article-Number 232902
EISSN 1077-3118
Keywords-Plus PERIODICALLY POLED LINBO3; 2ND-HARMONIC GENERATION; FERROELECTRIC DOMAINS; CRYSTALS; LITAO3; INVERSION; DEVICES; SURFACE; LAYER; FIELD
Research-Areas Physics
Web-of-Science-Categories Physics, Applied
Author-Email vladimir.shur@urfu.ru
ResearcherID-Numbers Chezganov, Dmitry/K-6479-2015 Kuznetsov, Dmitry/K-8081-2015 Akhmatkhanov, Andrei/A-8072-2010 Shur, Vladimir/J-9078-2015
ORCID-Numbers Chezganov, Dmitry/0000-0001-8696-262X Akhmatkhanov, Andrei/0000-0002-2802-9134
Funding-Acknowledgement Ministry of Education and Science of the Russian Federation {[}RFMEFI59414X0011]; RFBR {[}13-02-01391-a, 14-02-31255-mol\_a, 15-32-21102-mol\_a\_ved]; Ural Federal University
Funding-Text The authors would like to acknowledge M. Smirnov for participation in the experiments, M. Chuvakova for technical assistance, and E. L. Rumyantsev for helpful discussions. The equipment of the Ural Center for Shared Use ``Modern nanotechnology{''} UrFU was used. The research was made possible in part by the Ministry of Education and Science of the Russian Federation (UID RFMEFI59414X0011), by RFBR (13-02-01391-a, 14-02-31255-mol\_a, and 15-32-21102-mol\_a\_ved), and by Ural Federal University with the financial support of young scientists.
Number-of-Cited-References 33
Usage-Count-Last-180-days 1
Usage-Count-Since-2013 14
Journal-ISO Appl. Phys. Lett.
Doc-Delivery-Number CK4DL