Electron microscopic imaging of an ion beam mixed SiO2/Si interface correlated with photo- and cathodoluminescence / Fitting H. -J.,Kourkoutis L. Fitting,Schmidt B.,Liedke B.,Ivanova E. V.,Zamoryanskaya M. V.,Pustovarov V. A.,Zatsepin A. F. // PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. - 2012. - V. 209, l. 6. - P. 1101-1108.

ISSN/EISSN:

1862-6300 / нет данных

Type:

Article

Abstract:

Energy filtered transmission electron microscopy (EFTEM), scanning transmission electron microscopy (STEM) imaging, and electron energy loss spectroscopy (EELS) of a thin 28?nm SiO2 layer on Si substrate implanted by Si+ ions with an energy of 12?keV are reported. The maximum concentration of implanted Si+ ions is located near the SiO2Si interface region leading there to an ion beam mixed gradual SiOX (2?=?x?>?0) buffer region, which is even extended into the Si substrate by atomic collisions (knocking-off and knocking-on processes) during ion implantation. Thus, the width of this SiOX buffer layer amounts to about 30?nm extended from 10 to 40?nm depth. The SiOX profile is demonstrated by the above given electron microscopic and spectroscopic methods. Thermal annealing leads to partial phase separation from SiOX1 to SiOX2 with x2?>?x1 and silicon precipitates (partially nc-Si) changing the photo- (PL) and cathodoluminescence (CL) spectra especially in the near IR-region, probably, due to the formation of Si nanoclusters and associated quantum confinement effects.

Author keywords:

cathodoluminescence; energy-filtered TEM; ion beam mixing; silicon suboxides DYNAMIC COMPOSITION CHANGES; SI NANOCRYSTALS; SILICON NANOCRYSTALS; LAYERS; IMPLANTATION; OXYGEN; PHOTOLUMINESCENCE; NANOPARTICLES; SIMULATION; EMISSION

DOI:

10.1002/pssa.201127617

Web of Science ID:

ISI:000305122300016

Соавторы в МНС:

Другие поля

Поле	Значение
Month	JUN
Publisher	WILEY-V C H VERLAG GMBH
Address	BOSCHSTRASSE 12, D-69469 WEINHEIM, GERMANY
Language	English
Keywords-Plus	DYNAMIC COMPOSITION CHANGES; SI NANOCRYSTALS; SILICON NANOCRYSTALS; LAYERS; IMPLANTATION; OXYGEN; PHOTOLUMINESCENCE; NANOPARTICLES; SIMULATION; EMISSION
Research-Areas	Materials Science; Physics
Web-of-Science-Categories	Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter
Author-Email	hans-joachim.fitting@uni-rostock.de
ResearcherID-Numbers	Zamoryanskaya, Maria/A-8508-2014 Zatsepin, Anatoly/L-7335-2016 Zatsepin, Dmitry/F-5520-2012 Ivanova, Ekaterina/A-8444-2014
ORCID-Numbers	Zatsepin, Anatoly/0000-0001-9539-2403 Kourkoutis, Lena/0000-0002-1303-1362
Number-of-Cited-References	26
Usage-Count-Last-180-days	1
Usage-Count-Since-2013	27
Journal-ISO	Phys. Status Solidi A-Appl. Mat.
Doc-Delivery-Number	956XG