Hysteresis-free high-temperature precise bimorph actuators produced by direct bonding of lithium niobate wafers / Shur V. Ya,Baturin I. S.,Mingaliev E. A.,Zorikhin D. V.,Udalov A. R.,Greshnyakov E. D. // APPLIED PHYSICS LETTERS. - 2015. - V. 106, l. 5.

ISSN/EISSN:

0003-6951 / 1077-3118

Type:

Article

Abstract:

The current paper presents a piezoelectric bimorph actuator produced by direct bonding of lithium niobate wafers with the mirrored Y and Z axes. Direct bonding technology allowed to fabricate bidomain plate with precise positioning of ideally flat domain boundary. By optimizing the cutting angle (128 degrees Y-cut), the piezoelectric constant became as large as 27.3 pC/N. Investigation of voltage dependence of bending displacement confirmed that bimorph actuator has excellent linearity and hysteresis-free. Decrease of the applied voltage down to mV range showed the perfect linearity up to the sub-nm deflection amplitude. The frequency and temperature dependences of electromechanical transmission coefficient in wide temperature range (from 300 to 900 K) were investigated. (C) 2015 AIP Publishing LLC.

Author keywords:

FERROELECTRIC INVERSION LAYER; PIEZOELECTRIC ACTUATORS; SINGLE-CRYSTALS; LINBO3 PLATES; PERFORMANCE

DOI:

10.1063/1.4907679

Web of Science ID:

ISI:000349611800062

Соавторы в МНС:

Другие поля

Поле	Значение
Month	FEB 2
Publisher	AMER INST PHYSICS
Address	1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Language	English
Article-Number	053116
EISSN	1077-3118
Keywords-Plus	FERROELECTRIC INVERSION LAYER; PIEZOELECTRIC ACTUATORS; SINGLE-CRYSTALS; LINBO3 PLATES; PERFORMANCE
Research-Areas	Physics
Web-of-Science-Categories	Physics, Applied
ResearcherID-Numbers	Mingaliev, Eugene/A-5324-2012 Greshnyakov, Evgeny/J-4380-2017 Baturin, Ivan/B-1164-2008 Shur, Vladimir/J-9078-2015
ORCID-Numbers	Mingaliev, Eugene/0000-0003-3926-8402 Baturin, Ivan/0000-0002-7033-6103
Funding-Acknowledgement	Ministry of Education and Science of the Russian Federation {[}14.594.21.0011, 14.513.12.0006, 2457]
Funding-Text	The equipment of the Ural Center for Shared Use ``Modern Nanotechnology,{''} Ural Federal University has been used. The research was made possible in part by the Ministry of Education and Science of the Russian Federation (Nos. 14.594.21.0011, 14.513.12.0006, and 2457).
Number-of-Cited-References	28
Usage-Count-Last-180-days	1
Usage-Count-Since-2013	12
Journal-ISO	Appl. Phys. Lett.
Doc-Delivery-Number	CB4QB