Exoelectron emission computerized topography: Instrumental implementation and possibilities for practical application / Kortov VS,Isakov VG,Slesarev AI,Khrustalev AB,Timofeev YY,Kibirev GI // RUSSIAN JOURNAL OF NONDESTRUCTIVE TESTING. - 1996. - V. 32, l. 1. - P. 44-51.

ISSN/EISSN:

1061-8309 / нет данных

Type:

Article

Abstract:

We have developed a prototype for an automated scanning exoelectron emission flaw detector, designed for nondestructive testing of materials and products by exoemission computerized topography. We describe its analytical capabilities for the inspection of surface layers of material, and the hardware and software. We give examples of the practical use of the flaw detector for inspection of welded joints and assessment of the quality of mechanical treatment of the surface of semiconductor wafers.

Author keywords:

нет данных

DOI:

нет данных

Web of Science ID:

ISI:A1996WC00900007

Соавторы в МНС:

Другие поля

Поле	Значение
Month	JAN
Publisher	PLENUM PUBL CORP
Address	CONSULTANTS BUREAU, 233 SPRING ST, NEW YORK, NY 10013
Language	English
Research-Areas	Materials Science
Web-of-Science-Categories	Materials Science, Characterization \& Testing
Number-of-Cited-References	16
Journal-ISO	Russ. J. Nondestr. Test.
Doc-Delivery-Number	WC009