Electron Beam Domain Patterning of MgO-Doped Lithium Niobate Crystals Covered by Resist Layer / Chezganov D. S.,Smirnov M. M.,Kuznetsov D. K.,Shur V. Ya // FERROELECTRICS. - 2015. - V. 476, l. 1, SI. - P. 117-126.

ISSN/EISSN:

0015-0193 / 1563-5112

Type:

Article; Proceedings Paper

Abstract:

The electron beam domain patterning of MgO-doped congruent lithium niobate (LN) single crystals covered by electron beam resist layer were studied for various layer thicknesses and electron accelerating voltages. The obtained domain patterns were divided in four types. The increasing of the domain structure quality under presence of the resist layer on irradiated surface was confirmed. This effect was attributed to high concentration of the electron traps in resist, which localized incident electrons in limited volume over LN surface and formed effective electrode. The voltage dependence of space charge localization relative to the LN surface was studied by computer simulation.

Author keywords:

lithium niobate; regular domain structure; Electron beam patterning; electron beam resist; domain structure PERIODICALLY POLED LINBO3; FERROELECTRIC-DOMAIN; 2ND-HARMONIC GENERATION; BLUE-LIGHT; INVERSION; LITAO3; FIELD; FABRICATION; DEVICES; SURFACE

DOI:

10.1080/00150193.2015.998909

Web of Science ID:

ISI:000351836200008

Соавторы в МНС:

Другие поля

Поле	Значение
Month	FEB 17
Note	International Conference of Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (PFM 2014), Ekaterinburg, RUSSIA, JUL 14-17, 2014
Organization	Inst Nat Sci, Ferroelect \& Nanoscale Ferroelect Lab; Ural Fed Univ, Ural Ctr Shared Use Modern Nanotechnol
Publisher	TAYLOR \& FRANCIS LTD
Address	2-4 PARK SQUARE, MILTON PARK, ABINGDON OR14 4RN, OXON, ENGLAND
Language	English
EISSN	1563-5112
Keywords-Plus	PERIODICALLY POLED LINBO3; FERROELECTRIC-DOMAIN; 2ND-HARMONIC GENERATION; BLUE-LIGHT; INVERSION; LITAO3; FIELD; FABRICATION; DEVICES; SURFACE
Research-Areas	Materials Science; Physics
Web-of-Science-Categories	Materials Science, Multidisciplinary; Physics, Condensed Matter
Author-Email	dmit.chezganov@gmail.com
ResearcherID-Numbers	Chezganov, Dmitry/K-6479-2015 Kuznetsov, Dmitry/K-8081-2015 Shur, Vladimir/J-9078-2015
ORCID-Numbers	Chezganov, Dmitry/0000-0001-8696-262X
Funding-Acknowledgement	Ministry of Education and Science of Russian Federation {[}14.594.21.0011]; RFBR {[}13-02-01391-a, 14-02-31255-mol\_a]
Funding-Text	The research was made possible in part by the Ministry of Education and Science of Russian Federation (contract No. 14.594.21.0011), by RFBR (grants 13-02-01391-a, 14-02-31255-mol\_a), and by Ural Federal University development program with the financial support of young scientists.
Number-of-Cited-References	45
Usage-Count-Since-2013	8
Journal-ISO	Ferroelectrics
Doc-Delivery-Number	CE4YK