Crystallization kinetics and texture of sol-gel PZT thin films / Shur VY,Blankova EB,Subbotin AL,Borisova EA,Bolten D,Gerhardt R,Waser R // . - 1999. - V. 541, l. . - P. 363-368.

ISSN/EISSN:

0272-9172 / нет данных

Type:

Proceedings Paper

Abstract:

The morphology and phase evolution of sol-gel PZT thin films during rapid thermal annealing are investigated by in situ recording of scattered light intensity measured in reflected mode and momentary patterns visualized by optical microscope. In addition the texture and fractions of growing phases and the angular dependence of the scattered light are studied in partly annealed films. The kinetic parameters characterizing the transition from pyrochlore to perovskite phase are extracted by mathematical treatment of experimental data. It is shown that the film's texture and the transformation kinetics strongly depend on pyrolysis temperature. A mechanism of texture formation is proposed.

Author keywords:

нет данных

DOI:

нет данных

Web of Science ID:

ISI:000081716100054

Соавторы в МНС:

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Другие поля

Поле	Значение
Editor	Jones, RE and Schwartz, RW and Summerfelt, SR and Yoo, IK
Booktitle	FERROELECTRIC THIN FILMS VII
Series	MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
Note	Symposium on Ferroelectric Thin Films VII, BOSTON, MA, NOV 30-DEC 03, 1998
Organization	Mat Res Soc
Publisher	MATERIALS RESEARCH SOCIETY
Address	506 KEYSTONE DRIVE, WARRENDALE, PA 15088-7563 USA
Language	English
ISBN	1-55899-447-5
Research-Areas	Materials Science
Web-of-Science-Categories	Materials Science, Multidisciplinary; Materials Science, Characterization \& Testing; Materials Science, Coatings \& Films
ResearcherID-Numbers	Gerhardt, Rosario/D-6573-2012 Shur, Vladimir/J-9078-2015
ORCID-Numbers	Gerhardt, Rosario/0000-0001-8774-0842
Number-of-Cited-References	15
Doc-Delivery-Number	BN36R