Month |
JUN 1 |
Publisher |
ELSEVIER SCIENCE SA |
Address |
PO BOX 564, 1001 LAUSANNE, SWITZERLAND |
Language |
English |
Keywords-Plus |
FABRICATION; DEPOSITION; SILICON; PBSE |
Research-Areas |
Materials Science; Physics |
Web-of-Science-Categories |
Materials Science, Multidisciplinary; Materials Science, Coatings \& Films; Physics, Applied; Physics, Condensed Matter |
Author-Email |
markv@mail.ustu.ru |
Number-of-Cited-References |
24 |
Usage-Count-Last-180-days |
4 |
Usage-Count-Since-2013 |
30 |
Journal-ISO |
Thin Solid Films |
Doc-Delivery-Number |
964TG |