Modeling of the generation of a vacuum using getter materials / Ivanov A. O.,Permikin D. V. // THEORETICAL FOUNDATIONS OF CHEMICAL ENGINEERING. - 2009. - V. 43, l. 6. - P. 936-943.

ISSN/EISSN:

0040-5795 / нет данных

Type:

Article

Abstract:

The problem of creating and maintaining a vacuum inside a hermetically sealed microchamber using gas-sorbing (getter) materials is considered. The vacuum is maintained for a long time at a constant level due to the sorption of gases; as a result, a thin layer of the reaction product forms on the surface of the getter plate. The theoretical description of the operation of a getter is performed, and a method for seeking the approximate analytical solution is proposed that makes it possible to estimate the value of pressure in the chamber and the time of the quasi-steady-state mode, which is important for engineering calculations.

Author keywords:

нет данных

DOI:

10.1134/S0040579509060116

Web of Science ID:

ISI:000272664100011

Соавторы в МНС:

Другие поля

Поле	Значение
Month	DEC
Publisher	MAIK NAUKA/INTERPERIODICA/SPRINGER
Address	233 SPRING ST, NEW YORK, NY 10013-1578 USA
Language	English
Research-Areas	Engineering
Web-of-Science-Categories	Engineering, Chemical
Author-Email	permikindv@mail.ru
ResearcherID-Numbers	Ivanov, Alexey/E-4442-2011
ORCID-Numbers	Ivanov, Alexey/0000-0001-8239-4039 Permikin, Dmitry/0000-0003-2819-8891
Number-of-Cited-References	5
Usage-Count-Last-180-days	5
Usage-Count-Since-2013	18
Journal-ISO	Theor. Found. Chem. Eng.
Doc-Delivery-Number	531KF