New lithium gas sorbents IV. Application to MEMS devices / Chuntonov K.,Ivanov A.,Permikin D. // JOURNAL OF ALLOYS AND COMPOUNDS. - 2009. - V. 471, l. 1-2. - P. 211-216.

ISSN/EISSN:

0925-8388 / нет данных

Type:

Article

Abstract:

A theory of gas sorption by lithium solid solutions, which is based on a simple diffusion model, has been applied to the processes of gettering residual gases in small sealed-off chambers of a MEMS-cavity type. The analysis of kinetics of the process leads to the conclusion that under certain conditions, which are formulated in the form of a criterial inequality G>1, there is no further need of outside means for pumping down the microchambers before sealing-off. A vacuum inside the microchamber is created and further maintained for a long time at a constant level due to gas sorption by the getter material itself. The huge sorption capacity of lithium solid solutions is able to increase the lifetime of evacuated MEMS devices by more than one order of magnitude and to extend it to 20 years. (C) 2008 Elsevier B. V. All rights reserved.

Author keywords:

Lithium alloys; Gas sorption; Diffusion; Getters; Vacuum package MEMS

DOI:

10.1016/j.jallcom.2008.03.060

Web of Science ID:

ISI:000265086300057

Соавторы в МНС:

Другие поля

Поле	Значение
Month	MAR 5
Publisher	ELSEVIER SCIENCE SA
Address	PO BOX 564, 1001 LAUSANNE, SWITZERLAND
Language	English
Research-Areas	Chemistry; Materials Science; Metallurgy \& Metallurgical Engineering
Web-of-Science-Categories	Chemistry, Physical; Materials Science, Multidisciplinary; Metallurgy \& Metallurgical Engineering
Author-Email	konstantin@chuntonov.com
ResearcherID-Numbers	Ivanov, Alexey/E-4442-2011
ORCID-Numbers	Ivanov, Alexey/0000-0001-8239-4039 Permikin, Dmitry/0000-0003-2819-8891
Number-of-Cited-References	23
Usage-Count-Last-180-days	2
Usage-Count-Since-2013	16
Journal-ISO	J. Alloy. Compd.
Doc-Delivery-Number	431TG