| Поле | Значение |
| Month | SEP-OCT |
| Publisher | AMER INST PHYSICS |
| Address | CIRCULATION FULFILLMENT DIV, 500 SUNNYSIDE BLVD, WOODBURY, NY 11797-2999 |
| Language | English |
| Research-Areas | Materials Science; Physics |
| Web-of-Science-Categories | Materials Science, Coatings \& Films; Physics, Applied |
| ResearcherID-Numbers | Sharipov, Felix/B-5059-2013 |
| ORCID-Numbers | Sharipov, Felix/0000-0001-9372-2915 |
| Number-of-Cited-References | 10 |
| Usage-Count-Since-2013 | 11 |
| Journal-ISO | J. Vac. Sci. Technol. A-Vac. Surf. Films |
| Doc-Delivery-Number | PH791 |