Generation of broad on beams in sources based on Penning system with nonequipotential cathode / Nikulin SP,Chichigin DF,Tretnikov PV // REVIEW OF SCIENTIFIC INSTRUMENTS. - 2004. - V. 75, l. 5, 2. - P. 1857-1859.

ISSN/EISSN:

0034-6748 / нет данных

Type:

Article; Proceedings Paper

Abstract:

A method of generation of uniform plasma in low-pressure glow discharges with oscillating electrons has been developed. The method is based on the separation of the cathode into several elements, with potentials of the parts being different. Experimental results show that the use of the nonequipotential cathode in the Penning system enables effective control of spatial plasma distribution. This makes it possible to obtain nearly uniform ion emission current distributions and to form broad beams. Two variants of ion sources are under investigation. The first source generates low energy (similar to1 keV) ions, which are often used for cleaning of surfaces. A treated target plays a role in one of the cathodes and acceleration of ions is realized directly in the cathode sheath. The required level of ion energy is provided by applying a corresponding voltage between the target and the anode of the system. The second source generates an ion beam with higher (several tens of keV) energy. Accelerating-decelerating ion optics is used in this variant. The efficiency of ion extraction, defined as the ratio of beam and discharge currents, is equal to 30\%. (C) 2004 American Institute of Physics.

Author keywords:

ION-SOURCE

DOI:

10.1063/1.1702112

Web of Science ID:

ISI:000221872500141

Соавторы в МНС:

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Другие поля

Поле	Значение
Month	MAY
Note	10th International Conference on Ion Sources, Dubna, RUSSIA, SEP 08-13, 2003
Organization	Joint Inst Nucl Res
Publisher	AMER INST PHYSICS
Address	CIRCULATION \& FULFILLMENT DIV, 2 HUNTINGTON QUADRANGLE, STE 1 N O 1, MELVILLE, NY 11747-4501 USA
Language	English
Keywords-Plus	ION-SOURCE
Research-Areas	Instruments \& Instrumentation; Physics
Web-of-Science-Categories	Instruments \& Instrumentation; Physics, Applied
Author-Email	nikulin@iep.uran.ru
ResearcherID-Numbers	Nikulin, Sergey/S-4592-2016
Number-of-Cited-References	6
Journal-ISO	Rev. Sci. Instrum.
Doc-Delivery-Number	827BF