Source of intense wide beams of gas ions based on the discharge with a hollow cathode in a magnetic field / Gavrilov NV,Nikulin SP,Radkovskii GV // INSTRUMENTS AND EXPERIMENTAL TECHNIQUES. - 1996. - V. 39, l. 1. - P. 81-85.

ISSN/EISSN:

0020-4412 / нет данных

Type:

Article

Abstract:

An ion source is described that is based on a low-pressure glow discharge (less than or equal to 0.1 Pa) with oscillating electrons in a weak magnetic field (0.2-5 mT). It is shown that ion beams can be produced that have a cross-section area up to 1000 cm(2), a current density of 0.1-10 mA/cm(2), and a distribution inhomogeneity over the beam cross section of less than or equal to 10\%. Mass-charge composition of the ion beam was measured with O-2, N-2, and Ar. It was shown that the impurity content could be reduced down to a few fractions of a percent. Having a cold cathode with an increased service life (similar to 1000 hours), the source for the ion-implantation treatment produces a wide (similar to 150 cm(2)) ion beam of energy up to 40 keV and an average current up to 50 mA in the pulsed-periodic regime (f = 1-50 s(-1), t = 1 ms).

Author keywords:

нет данных

DOI:

нет данных

Web of Science ID:

ISI:A1996UX88200020

Соавторы в МНС:

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Другие поля

Поле	Значение
Month	JAN-FEB
Publisher	PLENUM PUBL CORP
Address	CONSULTANTS BUREAU 233 SPRING ST, NEW YORK, NY 10013
Language	English
Research-Areas	Engineering; Instruments \& Instrumentation
Web-of-Science-Categories	Engineering, Multidisciplinary; Instruments \& Instrumentation
ResearcherID-Numbers	Nikulin, Sergey/S-4592-2016
ORCID-Numbers	Gavrilov, Nikolai/0000-0003-1542-0107
Number-of-Cited-References	16
Usage-Count-Since-2013	1
Journal-ISO	Instrum. Exp. Tech.
Doc-Delivery-Number	UX882