Using of the high-grade layered structures for the demonstration of the depth resolution of the RBS method / Kobzev AP,Kravtcov EA,Romashev LN,Semerikov AV,Ustinov VV // VACUUM. - 2001. - V. 63, l. 4. - P. 501-505.

ISSN/EISSN:

0042-207X / нет данных

Type:

Article; Proceedings Paper

Abstract:

The ability of the RBS method to investigate element depth profiles is reviewed. The influence of the experimental conditions on the limiting depth resolution is discussed. The experimental spectra of He-4 ions backscattered by two high-grade thin layer structures on an Al2O3 substrate have been measured. In the spectra, one can see some differences between the real layered structure and an ideal one. The limit depth resolution of the RBS technique in the IBM-geometry with a silicon planar detector has been derived for elements of middle atomic mass. The limiting resolution has been evaluated as 2 nm. (C) 2001 Elsevier Science Ltd. All rights reserved.

Author keywords:

Rutherford back Scattering; depth resolution; metallic multilayers; nanostructures

DOI:

10.1016/S0042-207X(01)00229-9

Web of Science ID:

ISI:000170886900010

Соавторы в МНС:

—

Другие поля

Поле	Значение
Month	AUG 16
Note	International Symposium on Ion Implantation and Other Applications of IOns and Electrons (ION 2000), KAZIMIERS DOLNY, POLAND, JUN 12-15, 2000
Organization	Inst Phys; Maria Curie Sklodowska Univ; Tech Univ Lublin; Tech Univ Wroclaw
Publisher	PERGAMON-ELSEVIER SCIENCE LTD
Address	THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND
Language	English
Research-Areas	Materials Science; Physics
Web-of-Science-Categories	Materials Science, Multidisciplinary; Physics, Applied
ResearcherID-Numbers	Romashev, Lazar/J-7644-2013 Kravtsov, Evgeny/J-3593-2013 Ustinov, Vladimir/G-7501-2011
ORCID-Numbers	Romashev, Lazar/0000-0002-6051-4543 Kravtsov, Evgeny/0000-0002-5663-5692 Ustinov, Vladimir/0000-0002-5155-7947
Number-of-Cited-References	5
Usage-Count-Since-2013	2
Journal-ISO	Vacuum
Doc-Delivery-Number	470TH